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Deterministic Shallow Dopant Implantation in Silicon with Detection Confidence Upper-Bound to 99.85% by Ion-Solid Interactions.
Adv Mater. 2022 Jan;34(3):e2103235. doi: 10.1002/adma.202103235. Epub 2021 Nov 12.
Adv Mater. 2022.
PMID: 34632636
Free PMC article.
Scalable Atomic Arrays for Spin-Based Quantum Computers in Silicon.
Jakob AM, Robson SG, Firgau HR, Mourik V, Schmitt V, Holmes D, Posselt M, Mayes ELH, Spemann D, McCallum JC, Morello A, Jamieson DN.
Jakob AM, et al.
Adv Mater. 2024 Oct;36(40):e2405006. doi: 10.1002/adma.202405006. Epub 2024 Aug 29.
Adv Mater. 2024.
PMID: 39205533
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