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Computational vibration mitigation using phase interpolation in digital holographic microscopy for overlay metrology.
Opt Express. 2024 Oct 7;32(21):36315-36328. doi: 10.1364/OE.534958.
Opt Express. 2024.
PMID: 39573528
Free article.
Field-position dependent apodization in dark-field digital holographic microscopy for semiconductor metrology.
van Gardingen-Cromwijk T, Adhikary M, Messinis C, Konijnenberg S, Coene W, Witte S, de Boer JF, den Boef A.
van Gardingen-Cromwijk T, et al.
Opt Express. 2023 Jan 2;31(1):411-425. doi: 10.1364/OE.476157.
Opt Express. 2023.
PMID: 36606976
Free article.
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