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Correction: Integrated silicon photonic MEMS.
Quack N, Takabayashi AY, Sattari H, Edinger P, Jo G, Bleiker SJ, Errando-Herranz C, Gylfason KB, Niklaus F, Khan U, Verheyen P, Mallik AK, Lee JS, Jezzini M, Zand I, Morrissey P, Antony C, O'Brien P, Bogaerts W. Quack N, et al. Microsyst Nanoeng. 2024 Jan 24;10:17. doi: 10.1038/s41378-023-00649-2. eCollection 2024. Microsyst Nanoeng. 2024. PMID: 38268775 Free PMC article.
Integrated silicon photonic MEMS.
Quack N, Takabayashi AY, Sattari H, Edinger P, Jo G, Bleiker SJ, Errando-Herranz C, Gylfason KB, Niklaus F, Khan U, Verheyen P, Mallik AK, Lee JS, Jezzini M, Morrissey P, Antony C, O'Brien P, Bogaerts W. Quack N, et al. Microsyst Nanoeng. 2023 Mar 20;9:27. doi: 10.1038/s41378-023-00498-z. eCollection 2023. Microsyst Nanoeng. 2023. PMID: 36949734 Free PMC article.
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