Self-Assembly of Nanovoids in Si Microcrystals Epitaxially Grown on Deeply Patterned Substrates.
Barzaghi A, Firoozabadi S, Salvalaglio M, Bergamaschini R, Ballabio A, Beyer A, Albani M, Valente J, Voigt A, Paul DJ, Miglio L, Montalenti F, Volz K, Isella G.
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Cryst Growth Des. 2020 May 6;20(5):2914-2920. doi: 10.1021/acs.cgd.9b01312. Epub 2020 Apr 8.
Cryst Growth Des. 2020.
PMID: 33828439
Free PMC article.