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SiGe-enhanced Si capacitive modulator integration in a 300 mm silicon photonics platform for low power consumption.
Douix M, Perez-Galacho D, Charlet I, Baudot C, Acosta-Alba P, Kerdilès S, Euvrard C, Grosse P, Planchot J, Blanc R, Beneyton R, Gourhant O, Crémer S, Souhaité A, Vulliet N, Vivien L, Marris-Morini D, Boeuf F. Douix M, et al. Opt Express. 2019 Jun 24;27(13):17701-17707. doi: 10.1364/OE.27.017701. Opt Express. 2019. PMID: 31252726 Free article.
Low loss poly-silicon for high performance capacitive silicon modulators.
Douix M, Baudot C, Marris-Morini D, Valéry A, Fowler D, Acosta-Alba P, Kerdilès S, Euvrard C, Blanc R, Beneyton R, Souhaité A, Crémer S, Vulliet N, Vivien L, Boeuf F. Douix M, et al. Opt Express. 2018 Mar 5;26(5):5983-5990. doi: 10.1364/OE.26.005983. Opt Express. 2018. PMID: 29529794 Free article.