Coene WM - Search Results

1

Wafer-based aberration metrology for lithographic systems using overlay measurements on targets imaged from phase-shift gratings.

van Haver S, Coene WM, D'havé K, Geypen N, van Adrichem P, de Winter L, Janssen AJ, Cheng S. van Haver S, et al. Among authors: coene wm. Appl Opt. 2014 Apr 20;53(12):2562-82. doi: 10.1364/AO.53.002562. Appl Opt. 2014. PMID: 24787582

2

Improved ptychographic inspection of EUV reticles via inclusion of prior information.

Ansuinelli P, Coene WMJ, Urbach HP. Ansuinelli P, et al. Among authors: coene wmj. Appl Opt. 2020 Jul 10;59(20):5937-5947. doi: 10.1364/AO.395446. Appl Opt. 2020. PMID: 32672737

3

Automatic feature selection in EUV scatterometry.

Ansuinelli P, Coene WMJ, Urbach HP. Ansuinelli P, et al. Among authors: coene wmj. Appl Opt. 2019 Aug 1;58(22):5916-5923. doi: 10.1364/AO.58.005916. Appl Opt. 2019. PMID: 31503906

4

Model-independent noise-robust extension of ptychography.

Konijnenberg AP, Coene WMJ, Urbach HP. Konijnenberg AP, et al. Among authors: coene wmj. Opt Express. 2018 Mar 5;26(5):5857-5874. doi: 10.1364/OE.26.005857. Opt Express. 2018. PMID: 29529787 Free article.

5

Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry.

Kumar N, Petrik P, Ramanandan GK, El Gawhary O, Roy S, Pereira SF, Coene WM, Urbach HP. Kumar N, et al. Among authors: coene wm. Opt Express. 2014 Oct 6;22(20):24678-88. doi: 10.1364/OE.22.024678. Opt Express. 2014. PMID: 25322042 Free article.

6

Non-iterative method for phase retrieval and coherence characterization by focus variation using a fixed star-shaped mask.

Konijnenberg AP, Lu X, Liu L, Coene WMJ, Zhao C, Urbach HP. Konijnenberg AP, et al. Among authors: coene wmj. Opt Express. 2018 Apr 2;26(7):9332-9343. doi: 10.1364/OE.26.009332. Opt Express. 2018. PMID: 29715886 Free article.

7

Phase retrieval algorithms for lensless imaging using diffractive shearing interferometry.

Konijnenberg AP, de Beurs ACC, Jansen GSM, Urbach HP, Witte S, Coene WMJ. Konijnenberg AP, et al. Among authors: coene wmj. J Opt Soc Am A Opt Image Sci Vis. 2020 Jun 1;37(6):914-924. doi: 10.1364/JOSAA.389791. J Opt Soc Am A Opt Image Sci Vis. 2020. PMID: 32543591

8

Non-iterative phase retrieval by phase modulation through a single parameter.

Konijnenberg AP, Coene WMJ, Urbach HP. Konijnenberg AP, et al. Among authors: coene wmj. Ultramicroscopy. 2017 Mar;174:70-78. doi: 10.1016/j.ultramic.2016.12.017. Epub 2016 Dec 26. Ultramicroscopy. 2017. PMID: 28042982 Free article.

9

Combining ptychographical algorithms with the Hybrid Input-Output (HIO) algorithm.

Konijnenberg AP, Coene WMJ, Pereira SF, Urbach HP. Konijnenberg AP, et al. Among authors: coene wmj. Ultramicroscopy. 2016 Dec;171:43-54. doi: 10.1016/j.ultramic.2016.08.020. Epub 2016 Aug 31. Ultramicroscopy. 2016. PMID: 27615393 Free article.

10

Parameter retrieval of small particles in dark-field Fourier ptychography and a rectangle in real-space ptychography.

Wei X, Urbach HP, van der Walle P, Coene WMJ. Wei X, et al. Among authors: coene wmj. Ultramicroscopy. 2021 Oct;229:113335. doi: 10.1016/j.ultramic.2021.113335. Epub 2021 Jun 24. Ultramicroscopy. 2021. PMID: 34243020 Free article.

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