Biomimetic Microstructure with Anti-Slip and Anti-Adhesion for Efficient Handling of Brittle Material Surfaces in High-Temperature Environments

Abstract

Non-destructive handling such as wafer handling usually requires a high-temperature environment, however, most bionic materials fail in high temperatures due to material decomposition. In this study, inspired by the unique microstructure of locust toe pads with low adhesion and high friction, bionic high-temperature friction pads are designed and fabricated, selecting high-temperature-resistant silicone rubber as the material. The interfacial mechanical properties at high temperatures are analyzed. The samples with terminal bulges possess preferable roughness adaptability, enabling the advantages of low adhesion and high friction in high temperatures. The high-temperature non-destructive handling experiment using a robotic arm verifies the feasibility of bionic high-temperature friction pads in industrial applications and provides a valuable solution for non-destructive handling in high-temperature environments.

Keywords: adhesion; bio‐inspired microstructures; friction; high temperatures; wafer handling.