We report on a direct search for scalar field dark matter using data from LIGO's third observing run. We analyze the coupling of size oscillations of the interferometer's beam splitter and arm test masses that may be caused by scalar field dark matter. Using new efficient search methods to maximize sensitivity for signatures of such oscillations, we set new upper limits for the coupling constants of scalar field dark matter as a function of its mass, which improve upon bounds from previous direct searches by up to four orders of magnitude in a frequency band from 10 to 180 Hz.