Diamond nanofocusing refractive X-ray lenses made by planar etching technology

J Synchrotron Radiat. 2019 Sep 1;26(Pt 5):1554-1557. doi: 10.1107/S1600577519007082. Epub 2019 Aug 1.

Abstract

The manufacturing steps and first tests of a refractive lens made of polycrystalline diamond are described. A fabrication process based on electron-beam lithography and deep reactive ion etching is introduced. Experimental tests on beamline ID13 at the ESRF have been performed. A spot size of 360 nm (FWHM) at an energy E = 24.3 keV is observed.

Keywords: X-ray lenses; compound refractive lens (CRL); diamond; focusing.