Nanolithography. Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures

Huang Gao; Yaowu Hu; Yi Xuan; Ji Li; Yingling Yang; Ramses V Martinez; Chunyu Li; Jian Luo; Minghao Qi; Gary J Cheng

doi:10.1126/science.1260139

Nanolithography. Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures

Science. 2014 Dec 12;346(6215):1352-6. doi: 10.1126/science.1260139.

Authors

Huang Gao¹, Yaowu Hu¹, Yi Xuan², Ji Li¹, Yingling Yang¹, Ramses V Martinez³, Chunyu Li⁴, Jian Luo⁵, Minghao Qi², Gary J Cheng⁶

Affiliations

¹ School of Industrial Engineering, Purdue University, West Lafayette, IN 47907, USA Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA.
² School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN 47907, USA Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA.
³ Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138, USA Madrid Institute for Advanced Studies, IMDEA Nanoscience, Ciudad Universitaria de Cantoblanco, 28049 Madrid, Spain.
⁴ Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA School of Materials Engineering, Purdue University, West Lafayette, IN 47907, USA.
⁵ Department of NanoEngineering, University of California, San Diego, La Jolla, CA 92093, USA.
⁶ School of Industrial Engineering, Purdue University, West Lafayette, IN 47907, USA Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA School of Mechanical Engineering, Purdue University, West Lafayette, IN 47907, USA. gjcheng@purdue.edu.

PMID: 25504717
DOI: 10.1126/science.1260139

Abstract

We report a low-cost, high-throughput benchtop method that enables thin layers of metal to be shaped with nanoscale precision by generating ultrahigh-strain-rate deformations. Laser shock imprinting can create three-dimensional crystalline metallic structures as small as 10 nanometers with ultrasmooth surfaces at ambient conditions. This technique enables the successful fabrications of large-area, uniform nanopatterns with aspect ratios as high as 5 for plasmonic and sensing applications, as well as mechanically strengthened nanostructures and metal-graphene hybrid nanodevices.

Publication types

Research Support, N.I.H., Extramural
Research Support, Non-U.S. Gov't
Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

Crystallization
Finite Element Analysis
Gold
Graphite
Lasers
Metal Nanoparticles*
Microscopy, Electron, Transmission
Molecular Dynamics Simulation
Nanotechnology / methods*
Surface Properties

Substances

Gold
Graphite

Abstract

Publication types

MeSH terms

Substances

Grants and funding