Setup of a scanning near field infrared microscope (SNIM): imaging of sub-surface nano-structures in gallium-doped silicon

Phys Chem Chem Phys. 2006 Feb 14;8(6):753-8. doi: 10.1039/b512780g. Epub 2005 Nov 22.

Abstract

We have realized a scanning near-field infrared microscope in the 3-4 microm wavelength range. As a light source, a tunable high power continuous wave infrared optical parametric oscillator with an output power of up to 2.9 W in the 3-4 microm range has been set up. Using scanning near field infrared microscopy (SNIM) imaging we have been able to obtain a lateral resolution of < or =30 nm at a wavelength of 3.2 microm, which is far below the far-field resolution limit of lambda/2. Using this "chemical nanoscope" we could image a sub-surface structure of implanted gallium ions in a topographically flat silicon wafer giving evidence for a near-field contrast. The observed contrast is explained in terms of the effective infrared reflection as a function of the sub-surface gallium doping concentration. The future use of the setup for nm imaging in the chemically important OH, N-H and C-H stretching vibration is discussed.

Publication types

  • Comparative Study
  • Research Support, Non-U.S. Gov't

MeSH terms

  • Chemical Phenomena
  • Chemistry, Physical
  • Computer Simulation
  • Gallium / chemistry*
  • Microscopy, Atomic Force
  • Microscopy, Confocal / instrumentation
  • Microscopy, Confocal / methods
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure*
  • Particle Size
  • Silicon / chemistry*
  • Spectroscopy, Near-Infrared / instrumentation*
  • Spectroscopy, Near-Infrared / methods*
  • Surface Properties

Substances

  • Gallium
  • Silicon